Photo Chuck Repair (Restoration)
ASML 8″ Scanner KrF
ASML 12″ Scanner ArF
Canon 6″ Stepper I4 Canon 8″ Stepper I4/I5
Canon 12″ Scanner ES-5/6 (FPA6000)
Nikon 8″ Stepper 19C~12D
Nikon 8″ Stepper I14D 12″ SF-150
Photo Chuck Repair List
| Maker | Size | Model | Remarks |
|---|---|---|---|
| ASML | 8" | 5500/100 5500/200 5500/300 5500/400 5500/500 5500/700 5500/800 5500/850 5500/1100 5500/1200 5500/1250 5500/1400 | I-line I-line I-line I-line I-line Krf-line Krf-line Krf-line Arf-line Arf-line Arf-line Arf-line |
| ASML | 12" | TWINSCAN XT:400G TWINSCAN XT:450G TWINSCAN XT:870G TWINSCAN XT:875G TWINSCAN XT:1000H TWINSCAN XT:1450G TWINSCAN XT:1700Fi TWINSCAN XT:1900Gi TWINSCAN XT:1950Hi TWINSCAN XT:1950i | |
| Canon | 8" | FPA3000IW FPA2500I2 FPA3000I4 FPA3000I5 FPA3000EX3 FPA3000EX4 FPA3000EX5 FPA3000EX6 | I-line I-line I-line I-line I-line I-line I-line I-line |
| Canon | 12" | FPA5500IZ+ FPA5000ES2 FPA5000ES2+ FPA5000ES3 FPA5000ES4 FPA6000ES5 FPA6000ES6 FPA6000AS4 FPA6000AS5 | |
| Nikon | 8" | I9C/10C/11D/12D NSR2205 I14D SF-100 SF-120 SF-130/140 S101A S201A S203A S204B S205/206D | I-line I-line Krf-line Krf-line Krf-line Krf-line Krf-line Krf-line Krf-line Krf-line |
| Nikon | 12" | SF-150 |
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