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O2 Technology

O2 Technology

Semiconductor Company

  • Home
  • About Us
    • Our Mission
    • What we do
    • Who we are
  • Products
    • CMP Parts
      • Retainer Ring (2nd)
      • Multi-hole Slurry Nozzle
      • CMP PVA Brush
      • CMP Dresser Brush
      • CMP filter
      • CMP Rotary Joint
      • CMP 200mm Cylinder type Pad Conditioner Assembly
    • ESC (OPM & 2nd Source)
    • Photo Chuck (2nd Source)
    • N2 FOUP Purge System
      • Why N2 FOUP Purge?
      • For Diffusion Furnace
      • For Cluster Type
    • Heating Jacket
    • Bonded Slit Valve (BSV)
    • Dry Pump Power Saver (e-Saver)
    • Remote Control System
    • Vacuum Bellows
  • Refurb & Repair
    • Ozone Generator Repair & Overhaul
    • Robot Repair and Overhaul Services
    • RPS Repair
    • On-site Chamber Regen Service
    • Diffusion Refurbishment
      • Diff Furnace Refurbishment
      • Diff Furnace Relocation
      • TEL Fomula Refurbishment
    • CMP Repair
      • CMP Repair Workflow
      • CMP Repair Details
    • CMP Refurbishment
    • AlN Heater Repair
    • ElectroStatic Chuck Repair
      • ESC Repair Workflow
      • ESC Repair List
    • Photo Chuck Repair
    • Showerhead Repair
    • Implant Arc Chamber Repair
  • Fab Solutions
    • CMP Cost Reduction
      • Retaining Ring Refurbishment
      • Membrane Cleaning
      • Retaining Ring Cleaning
      • Slurry Multi-hole Nozzle
    • Controlling O2 and moisture inside Equipment
    • PEO coated RPS Block
    • Dry Pump Power Saving
  • Surplus
    • Available Equipment
    • Wanted Equipment
  • Information
    • Semiconductor News
    • Papers
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    • Contact Us
    • Locations

Refurb & Repair

  • CMP Equipment Repair
  • Diffusion Furnace Refurbishment
  • Diffusion Furnace Relocation
  • Implant Arc Chamber Repair
  • RF Generator, RPS (Remote Plasma Source), Microwave, Matching network Repair
  • AlN (Aluminum Nitride) Heater Repair
  • ESC (ElectroStatic Chuck) Repair
  • Metal Showerhead Repair

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