Heating Jacket Line-up
Comparison of Configurations and Features
100% PTFE | PTFE Coated Glass Fiber | Silicon Coated Glass Fiber | |
Materials (Outer/ Insulator/ Heating Element/ Inner) | 100%PTFE cloth / Silica/ dual or single Ni-Cr wire/ 100%PTFE | PTFE coated glass fiber/ optional / dual or single Ni-Cr wire/ PTFE coated glass fiber | Silicon coated glass fiber/ optional / dual or single Ni-Cr wire/ Silicon coated glass fiber |
Application | Vacuum & Special gas line | Vacuum & Special gas line | Pump fore line, pump inlet & outlet, Scrubber |
Process | Metal, CVD, Diff, Etch | Etch, Nitride LPCVD, TEOS, ALD | |
Specification | up to 280°C | up to 250°C | up to 180°C |
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