About Muti-hole Slurry Nozzle
[ configuration of multi-hole slurry nozzle ]
- By modifying design of slurry delivery system, 30~40% of slurry can be saved at same removal rate of CMP process.
- Patent-granted technology is used for slurry multi-hole nozzle, which is based on the slit nozzle technology in the FPD (LCD, OLED) industry.
[ Newly designed multi-hole slurry nozzle ]
[ Existing single hole slurry nozzle ]
Effects of Multi-hole Slurry Nozzle
How Multi-hole Slurry Nozzle Works
Multi-hole Slurry Nozzle Retrofit Kit
- O2 technology is to provide complete retrofit kit of slurry delivery arm module for multi-hole nozzle.
- Customers can easily install multi-hole slurry nozzle with the manual that O2 technology provides.
- Retrofit kit of slurry delivery arm module is available for all type of CMP equipment.
- Further information is available on request.
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