CMP filter

Features of CMP Filter

Flomax CMP Depth Filter

Flomax CMP Capsule Filter

  • Consistent and reproducible performance and cost saving up to 30~40%. Widely adopted in the top-tier semiconductor companies in Korea.
  • Applicable to all AMAT, Ebara equipment, and so on.
  • Available in many removal ratings and configuration.
  • Custom filter size is available.

Product List of CMP Filter

*custom size filter is available.


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