CMP 200mm Cylinder type Pad Conditioner Assembly

Why cylinder type 200mm Pad Conditioner Head and Assembly?

This cylinder-type pad conditioner head and assembly have been newly designed for AMAT 200mm CMP equipment to resolve existing troublesome problems that the original diaphragm-type pad conditioner has as well as it provides functionality of 300mm  to 200mm AMAT CMP equipment such as up/down detection, pressure tolerance alarming system, and so on.  Eventually it enables stable and consistent CMP equipment management and semiconductor manufacturing environment.

200mm AMAT cylinder type pad conditioner head and assembly

Configurations

200mm CMP cylinder type pad conditioner head assembly controller

 [ Pad Conditioner Controller]                                  [Pad Conditioner Assembly]

Extra Functions

200mm cylinder type pad conditioner head and assembly extra functions

Customers (Installed base)

  • S-company in Korea (210units)
  • SH-company in Korea (150units)
  • STMicro (Europe)

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