Why PEO (Plasma Electrolytic Oxidation) Coating for RPS block?
- RPS block and components in the Remote Plasma Source are exposed to the highly reactive plasma environment.
- It causes surface corrosion to result in reduced lifespan of components and plasma induced particles.
- So that quality coating technology for superior surface of RPS block and components over existing hard anodizing is highly required.
What is PEO (Plasma Electrolytic Oxidation) ?
- PEO (Plasma Electrolytic Oxidation) is electrochemical surface treatment process for generating oxide coating on metals such as aluminum and magnesium by the application of electrical potentials, while the part is immersed in an acidic electrolyte.
- Surface coating formed through PEO can offer 2-4 time more hardness than hard anodizing or steel, and provide increased wear resistance, corrosion resistance and thermal and fatigue stability.
- Outer porous layer is formed as quickly as PEO coating started, and by applying heat and pressure, core dense layer is formed. As coating time goes, diffusion layer continue to grow and change into core dense layer.
Comparison of Corner Layer ( PEO coating vs. Hard Anodizing )
PEO coating
Hard Anodizing
- While hard anodizing forms porous, amorphous, and pillar-shaped oxide layer, PEO treatment forms much denser amorphous oxide layer through repetitive combination of processes such as anodizaition, dissolution, and dielectric breakdown, consequently which shows improved wear and chemical corrosion resistance properties.
List of Available PEO coated RPS block
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