Simple & Easy Maintenance Ion Source Head
By simplifying design of ion source and modifying multi-piece arc chamber to uni-body type, very easy maintenance (almost no maintenance) and cost savings (42%) are achieved.
Original Source Head Ass’y | Modified Source Head Ass’y | |
IHC : Indirectly Heated Cathode | EHS : Easy Maintenance Source | |
Configurations | Arc chamber (8pcs), Gas feed tube(1), Repeller Clamp Posts(1), Filament clamp posts(1), Cathode clamp posts(1), Aluminum post insulator(4), Arc chamber retaining spring hook(4), Cathode strap(1), Gas feed tube connector(1), Power feedthru(4), Post insulator shield(4) | ① Arc chamber (6pcs), ② Filament clamp posts (2), ③Repeller clamp posts(1), ④ Cathode clamp posts (1) |
Features |
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Multi-piece Arc Chamber | Uni-Body Arc Chamber | |
Features |
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Effective Tungsten (W) Coating on Graphite Parts
- Tungsten (W) Coating on Graphite : Arc Chamber built with graphite coated with tungsten shows better characteristics than one with pure tungsten. It is widely adopted in the top-tier semiconductor companies for the reason of low CoO (Cost of Ownership) and easy maintenance.
Aperture, Top
Repeller
Original (IHC) | Modified & Improved (EMS) | |
Materials | Pure Tungsten | Tungsten coating on Graphite |
Weight (g) | 672,4 g (Aperture) | 82.5 g (Aperture) |
thickness (um) | – | ≥ 250 ㎛ ( W – coating ) |
Parts Reusable ? | Not Reusable | Reusable 3 times (Aperture and Repeller) |
Arc Chamber Repair & Refurbishment
Before repair | After Repair | Details |
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Modified Parts List & Repairable Parts List
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