Metal

Consumable Parts & Engineering Parts

• N2 FOUP Purge System  (Purging load port of cluster type equipment)
• Bonded Slit Valve (BSV) Door 
• Remote Control System
• Dry Pump Power Saving Apparatus (MESA)
• ESC (OPM & 2nd Source)
• PEO Coated RPS Block

Repair & Refurbishment

• RF Generator, RPS, MW, and Matching Network Repair
• Electrostatic Chuck (ESC) Repair
• Showerhead Repair
• AlN Heater Repair
• Robot Repair

Cost Reduction Solutions

• Dry Pump Power Saving Apparatus (MESA)

Quality Improvement Solutions

• Controlling O2 and Moisture inside Cluster-type Equipment – N2 FOUP Purge System  (Purging load port of cluster type equipment)
• PEO Coated RPS Block