Vacuum Bellows

hi-end bellows double ply lamina flow liner bellows safety environment
Left : Double Ply Bellows, Center : LFD (Lamina Flow Double-ply) Bellows , Right : High-Tech Bellows (Diaphragm bellows with Liner)

Double-ply Bellows

  • Less stress (50% reduced), force, and torsion exerted on the double-layered bellows than conventional single-layered bellows results in increased lifespan of bellows
  • Corrosion resistance materials such as stainless steel 316L and double layered structure are adopted to minimize corrosion.
  • Double-ply bellows is good for the locations on which higher internal pressure is applied because of the double layered and corrugated structure.
  • Process Applications – Ti/TiN depo, USG depo, TEOS, W-plug, BPSG, PE-SiON, PE-SiO2, inside gas scrubber

Conventional bellows : by-products are observed around micro-cracks on the surface of conventional bellows after 3 months of use ( HF oxide process ),

Double-ply Bellows : no sign of micro-crack is observed on the double-ply bellows after 18 months of use.

LFD (Lamina Flow Double-ply) Bellows

  • LFD (Lamina Flow Double-ply) bellows
  • In addition to the functions of Double-ply bellows, corrosion resistant stainless steel liner is added to improve gas flow inside bellows from troublesome turbulent gas flow into lamina flow.
  • Accordingly, preventing outer ply of bellows from pitting corrosion, thermal corrosion, and stress corrosion lead to longer life span of bellows and contamination-free semiconductor manufacturing environment.

conventional bellows
LFD (Lamina Flow Double-ply) bellows

If you need more information,  please leave your contact information.   Contact Us