Equipment Refurbishment (CMP, Diffusion)
- We are specialized in semiconductor equipment full refurbishment. Our experienced engineers with expertise enable these works and well organized parts supply-chain for the refurbishment is established.
- These services are available to Diffusion Furnace (200,300mm KE, TEL) and CMP (200,300mm AMAT, Ebara)
Parts (Consumable & Repair)
- Supply Chain for OEM, second sourcing parts is well established.
- Well-organized parts inventory and management system.
- We provide even obsolete and discontinued parts through the relationship with suppliers established over a long period of time.
Parts Repair & Retrofit Services
- We can provide quality field-proven equipment and robot repair services which are already accepted in the top-tier semiconductor companies.
- We provide the improved design of equipment parts through communication with customer’s process and equipment engineers.
Parts Cleaning & PM Services
- We provide effective parts cleaning and PM services which have been evaluated and adopted in the semiconductor massive manufacturing environment.