Photo

Consumable Parts & Engineering Parts

• N2 FOUP Purge System  (Purging load port of cluster type equipment)
• Bonded Slit Valve (BSV) Door 
• Remote Control System
• ESC (OPM & 2nd Source)
• Second Source Photo Chuck (ASML. Nikon, Canon)

Repair & Refurbishment

• Robot Repair
• Photo Chuck Repair (ASML, Nikon, Canon)

Cost Reduction Solutions

Quality Improvement Solutions

• Controlling O2 and Moisture inside Cluster-type Equipment – N2 FOUP Purge System  (Purging load port of cluster type equipment)